Open access peer-reviewed Edited Volume
97041 Total Chapter Downloads
27 Crossref Citations
80 Web of Science Citations
69 Dimensions Citations
chapters | Downloads | |
---|---|---|
Open access peer-reviewed 1. Electron Beam Lithography for Fine Dot Arrays with Nanometer-Sized Dot and PitchBy Sumio Hosaka | 3005 | |
Open access peer-reviewed 2. Focused Ion Beam LithographyBy Heinz D. Wanzenboeck and Simon Waid | 9850 | |
Open access peer-reviewed 3. Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium BeamBy Jianwu Zhang, Zhongping Wang and Zengming Zhang | 2723 | |
Open access peer-reviewed 4. Character Projection Lithography for Application-Specific Integrated CircuitsBy Makoto Sugihara | 2048 | |
Open access peer-reviewed 5. Transform-Based Lossless Image Compression Algorithm for Electron Beam Direct Write Lithography SystemsBy Jeehong Yang and Serap A. Savari | 2030 | |
Open access peer-reviewed 6. Ultrafast Fabrication of Metal Nanostructures Using Pulsed Laser MeltingBy Bo Cui | 2881 | |
Open access peer-reviewed 7. Soft UV Nanoimprint Lithography: A Versatile Tool for Nanostructuration at the 20nm ScaleBy Andrea Cattoni, Jing Chen, Dominique Decanini, Jian Shi and Anne-Marie Haghiri-Gosnet | 3422 | |
Open access peer-reviewed 8. Repairing Nanoimprint Mold Defects by Focused-Ion-Beam Etching and DepositionBy Makoto Okada and Shinji Matsui | 2470 | |
Open access peer-reviewed 9. Improving the Light-Emitting Efficiency of GaN LEDs Using Nanoimprint LithographyBy Yeeu-Chang Lee and Sheng-Han Tu | 6901 | |
Open access peer-reviewed 10. Fabrication of Circular Grating Distributed Feedback Dye Laser by Nanoimprint LithographyBy Yan Chen, Zhenyu Li, Zhaoyu Zhang and Axel Scherer | 2956 | |
Open access peer-reviewed 11. Application of Nanoimprint Lithography to Distributed Feedback Laser DiodesBy Masaki Yanagisawa | 3029 | |
Open access peer-reviewed 12. Guided-Mode Resonance Filters Fabricated with Soft LithographyBy Kyu J. Lee, Jungho Jin, Byeong-Soo Bae and Robert Magnusson | 2982 | |
Open access peer-reviewed 13. DUV Interferometry for Micro and Nanopatterned SurfacesBy Olivier Soppera, Ali Dirani, Fabrice Stehlin, Hassan Ridaoui, Arnaud Spangenberg, Fernand Wieder and Vincent Roucoules | 2464 | |
Open access peer-reviewed 14. Ultrashort Pulsed Lasers – Efficient Tools for Materials Micro-ProcessingBy Marian Zamfirescu, Magdalena Ulmeanu, Alina Bunea, Gheorghe Sajin and Razvan Dabu | 2727 | |
Open access peer-reviewed 15. Laser-Based Lithography for Polymeric Nanocomposite StructuresBy Athanassia Athanassiou, Despina Fragouli, Francesca Villafiorita Monteleone, Athanasios Milionis, Fabrizio Spano, Ilker Bayer and Roberto Cingolani | 3109 | |
Open access peer-reviewed 16. Fabrication of 3-D Structures Utilizing Synchrotron Radiation LithographyBy Mitsuhiro Horade and Susumu Sugiyama | 2416 | |
Open access peer-reviewed 17. Emerging Maskless Nanolithography Based on Novel Diffraction GratingsBy Guanxiao Cheng, Yong Yang, Chao Hu, Ping Xu, Helun Song, Tingwen Xing and Max Q.-H. Meng | 2301 | |
Open access peer-reviewed 18. Laser-Plasma Extreme Ultraviolet Source Incorporating a Cryogenic Xe TargetBy Sho Amano | 2360 | |
Open access peer-reviewed 19. Irradiation Effects on EUV Nanolithography Collector MirrorsBy J.P. Allain | 2891 | |
Open access peer-reviewed 20. High-Index Immersion LithographyBy Keita Sakai | 3029 | |
Open access peer-reviewed 21. Double Patterning for Memory ICsBy Christoph Ludwig and Steffen Meyer | 5388 | |
Open access peer-reviewed 22. Diffraction Based Overlay Metrology for Double Patterning TechnologiesBy Prasad Dasari, Jie Li, Jiangtao Hu, Nigel Smith and Oleg Kritsun | 4676 | |
Open access peer-reviewed 23. Nanolithography Study Using Scanning Probe MicroscopeBy S. Sadegh Hassani and H. R. Aghabozorg | 2860 | |
Open access peer-reviewed 24. Scanning Probe Lithography on Organic MonolayersBy SunHyung Lee, Takahiro Ishizaki, Katsuya Teshima, Nagahiro Saito and Osamu Takai | 2300 | |
Open access peer-reviewed 25. Controlled Fabrication of Noble Metal Nanomaterials via Nanosphere Lithography and Their Optical PropertiesBy Yujun Song | 2369 | |
Open access peer-reviewed 26. A Feasible Routine for Large-Scale Nanopatterning via Nanosphere LithographyBy Zhenyang Zhong, Tong Zhou, Yiwei Sun and Jie Lin | 2787 | |
Open access peer-reviewed 27. Electrohydrodynamic Inkjet – Micro Pattern Fabrication for Printed Electronics ApplicationsBy Kyung-Hyun Choi, Khalid Rahman, Nauman Malik Muhammad, Arshad Khan, Ki-Rin Kwon, Yang-Hoi Doh and Hyung-Chan Kim | 6120 | |
Open access peer-reviewed 28. Lithography-Free Nanostructure Fabrication Techniques Utilizing Thin-Film EdgesBy Hideo Kaiju, Kenji Kondo and Akira Ishibashi | 2050 | |
Open access peer-reviewed 29. Extremely Wetting Pattern by Photocatalytic Lithography and Its ApplicationBy Yuekun Lai, Changjian Lin and Zhong Chen | 2898 |
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