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Repairing Nanoimprint Mold Defects by Focused-Ion-Beam Etching and Deposition

Written By

Makoto Okada and Shinji Matsui

Submitted: 14 November 2010 Published: 02 December 2011

DOI: 10.5772/21483

From the Edited Volume

Recent Advances in Nanofabrication Techniques and Applications

Edited by Bo Cui

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Written By

Makoto Okada and Shinji Matsui

Submitted: 14 November 2010 Published: 02 December 2011