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Diffraction Based Overlay Metrology for Double Patterning Technologies

Written By

Prasad Dasari, Jie Li, Jiangtao Hu, Nigel Smith and Oleg Kritsun

Submitted: 17 November 2010 Published: 02 December 2011

DOI: 10.5772/21970

From the Edited Volume

Recent Advances in Nanofabrication Techniques and Applications

Edited by Bo Cui

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Written By

Prasad Dasari, Jie Li, Jiangtao Hu, Nigel Smith and Oleg Kritsun

Submitted: 17 November 2010 Published: 02 December 2011