Open access peer-reviewed chapter

Diffraction Based Overlay Metrology for Double Patterning Technologies

Written By

Prasad Dasari, Jie Li, Jiangtao Hu, Nigel Smith and Oleg Kritsun

Submitted: November 17th, 2010 Reviewed: June 5th, 2011 Published: December 2nd, 2011

DOI: 10.5772/21970

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Written By

Prasad Dasari, Jie Li, Jiangtao Hu, Nigel Smith and Oleg Kritsun

Submitted: November 17th, 2010 Reviewed: June 5th, 2011 Published: December 2nd, 2011