Open access peer-reviewed chapter

Laser-Plasma Extreme Ultraviolet Source Incorporating a Cryogenic Xe Target

Written By

Sho Amano

Submitted: November 19th, 2010 Reviewed: April 20th, 2011 Published: December 2nd, 2011

DOI: 10.5772/22403

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Written By

Sho Amano

Submitted: November 19th, 2010 Reviewed: April 20th, 2011 Published: December 2nd, 2011