Open access peer-reviewed chapter

Double Patterning for Memory ICs

Written By

Christoph Ludwig and Steffen Meyer

Submitted: November 24th, 2010 Reviewed: April 29th, 2011 Published: December 2nd, 2011

DOI: 10.5772/23193

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Written By

Christoph Ludwig and Steffen Meyer

Submitted: November 24th, 2010 Reviewed: April 29th, 2011 Published: December 2nd, 2011