Open access peer-reviewed Edited Volume

Recent Advances in Nanofabrication Techniques and Applications

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106,596 Chapter Downloads

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Academic Editor

Bo Cui

University of Waterloo, Canada

PublishedDecember 2nd, 2011

Doi10.5772/859

ISBN978-953-307-602-7

eBook (PDF) ISBN978-953-51-5554-6

Copyright year2011

Number of pages628

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Table of Contents

Open access peer-reviewed  chapters

2. Focused Ion Beam Lithography

By Heinz D. Wanzenboeck and Simon Waid

10,254
2
7. Soft UV Nanoimprint Lithography: A Versatile Tool for Nanostructuration at the 20nm Scale

By Andrea Cattoni, Jing Chen, Dominique Decanini, Jian Shi and Anne-Marie Haghiri-Gosnet

3,693
7
12. Guided-Mode Resonance Filters Fabricated with Soft Lithography

By Kyu J. Lee, Jungho Jin, Byeong-Soo Bae and Robert Magnusson

3,343
13. DUV Interferometry for Micro and Nanopatterned Surfaces

By Olivier Soppera, Ali Dirani, Fabrice Stehlin, Hassan Ridaoui, Arnaud Spangenberg, Fernand Wieder and Vincent Roucoules

2,701
14. Ultrashort Pulsed Lasers – Efficient Tools for Materials Micro-Processing

By Marian Zamfirescu, Magdalena Ulmeanu, Alina Bunea, Gheorghe Sajin and Razvan Dabu

3,096
1
15. Laser-Based Lithography for Polymeric Nanocomposite Structures

By Athanassia Athanassiou, Despina Fragouli, Francesca Villafiorita Monteleone, Athanasios Milionis, Fabrizio Spano, Ilker Bayer and Roberto Cingolani

3,430
1
17. Emerging Maskless Nanolithography Based on Novel Diffraction Gratings

By Guanxiao Cheng, Yong Yang, Chao Hu, Ping Xu, Helun Song, Tingwen Xing and Max Q.-H. Meng

2,591
21. Double Patterning for Memory ICs

By Christoph Ludwig and Steffen Meyer

5,784
1
22. Diffraction Based Overlay Metrology for Double Patterning Technologies

By Prasad Dasari, Jie Li, Jiangtao Hu, Nigel Smith and Oleg Kritsun

5,059
1
23. Nanolithography Study Using Scanning Probe Microscope

By S. Sadegh Hassani and H. R. Aghabozorg

3,145
1
24. Scanning Probe Lithography on Organic Monolayers

By SunHyung Lee, Takahiro Ishizaki, Katsuya Teshima, Nagahiro Saito and Osamu Takai

2,636
3,116
27. Electrohydrodynamic Inkjet – Micro Pattern Fabrication for Printed Electronics Applications

By Kyung-Hyun Choi, Khalid Rahman, Nauman Malik Muhammad, Arshad Khan, Ki-Rin Kwon, Yang-Hoi Doh and Hyung-Chan Kim

6,575
5

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106,596 Total Chapter Downloads

39 Crossref Citations

91 Web of Science Citations

92 Dimensions Citations

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