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DUV Interferometry for Micro and Nanopatterned Surfaces

Written By

Olivier Soppera, Ali Dirani, Fabrice Stehlin, Hassan Ridaoui, Arnaud Spangenberg, Fernand Wieder and Vincent Roucoules

Submitted: November 10th, 2010 Published: December 2nd, 2011

DOI: 10.5772/20896

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Written By

Olivier Soppera, Ali Dirani, Fabrice Stehlin, Hassan Ridaoui, Arnaud Spangenberg, Fernand Wieder and Vincent Roucoules

Submitted: November 10th, 2010 Published: December 2nd, 2011