Open access peer-reviewed chapter

Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam

Written By

Jianwu Zhang, Zhongping Wang and Zengming Zhang

Submitted: November 11th, 2010 Reviewed: June 28th, 2011 Published: December 2nd, 2011

DOI: 10.5772/21007

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Written By

Jianwu Zhang, Zhongping Wang and Zengming Zhang

Submitted: November 11th, 2010 Reviewed: June 28th, 2011 Published: December 2nd, 2011