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Atom Lithography: Fabricating Arrays of Silicon Microstructures Using Self-Assembled Monolayer Resist and Metastable Helium Beam

Written By

Jianwu Zhang, Zhongping Wang and Zengming Zhang

Submitted: 11 November 2010 Published: 02 December 2011

DOI: 10.5772/21007

From the Edited Volume

Recent Advances in Nanofabrication Techniques and Applications

Edited by Bo Cui

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Written By

Jianwu Zhang, Zhongping Wang and Zengming Zhang

Submitted: 11 November 2010 Published: 02 December 2011