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Focused Ion Beam Lithography

Written By

Heinz D. Wanzenboeck and Simon Waid

Submitted: 17 November 2010 Published: 02 December 2011

DOI: 10.5772/22075

From the Edited Volume

Recent Advances in Nanofabrication Techniques and Applications

Edited by Bo Cui

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Written By

Heinz D. Wanzenboeck and Simon Waid

Submitted: 17 November 2010 Published: 02 December 2011