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Soft UV Nanoimprint Lithography: A Versatile Tool for Nanostructuration at the 20nm Scale

Written By

Andrea Cattoni, Jing Chen, Dominique Decanini, Jian Shi and Anne-Marie Haghiri-Gosnet

Submitted: November 16th, 2010 Published: December 2nd, 2011

DOI: 10.5772/21874

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Written By

Andrea Cattoni, Jing Chen, Dominique Decanini, Jian Shi and Anne-Marie Haghiri-Gosnet

Submitted: November 16th, 2010 Published: December 2nd, 2011