Open access

High-Index Immersion Lithography

Written By

Keita Sakai

Submitted: 29 November 2010 Published: 02 December 2011

DOI: 10.5772/23630

From the Edited Volume

Recent Advances in Nanofabrication Techniques and Applications

Edited by Bo Cui

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Written By

Keita Sakai

Submitted: 29 November 2010 Published: 02 December 2011