Open access peer-reviewed chapter

Character Projection Lithography for Application-Specific Integrated Circuits

Written By

Makoto Sugihara

Submitted: November 25th, 2010 Reviewed: May 26th, 2011 Published: December 2nd, 2011

DOI: 10.5772/23269

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Written By

Makoto Sugihara

Submitted: November 25th, 2010 Reviewed: May 26th, 2011 Published: December 2nd, 2011