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Emerging Maskless Nanolithography Based on Novel Diffraction Gratings

Written By

Guanxiao Cheng, Yong Yang, Chao Hu, Ping Xu, Helun Song, Tingwen Xing and Max Q.-H. Meng

Submitted: November 18th, 2010 Published: December 2nd, 2011

DOI: 10.5772/22265

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Written By

Guanxiao Cheng, Yong Yang, Chao Hu, Ping Xu, Helun Song, Tingwen Xing and Max Q.-H. Meng

Submitted: November 18th, 2010 Published: December 2nd, 2011