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Electron Beam Lithography for Fine Dot Arrays with Nanometer-Sized Dot and Pitch

Written By

Sumio Hosaka

Submitted: 10 November 2010 Published: 02 December 2011

DOI: 10.5772/20711

From the Edited Volume

Recent Advances in Nanofabrication Techniques and Applications

Edited by Bo Cui

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Written By

Sumio Hosaka

Submitted: 10 November 2010 Published: 02 December 2011