Open access peer-reviewed chapter

Electron Beam Lithography for Fine Dot Arrays with Nanometer-Sized Dot and Pitch

Written By

Sumio Hosaka

Submitted: November 10th, 2010 Reviewed: August 3rd, 2011 Published: December 2nd, 2011

DOI: 10.5772/20711

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Written By

Sumio Hosaka

Submitted: November 10th, 2010 Reviewed: August 3rd, 2011 Published: December 2nd, 2011