Open access peer-reviewed chapter

Irradiation Effects on EUV Nanolithography Collector Mirrors

Written By

J.P. Allain

Submitted: December 4th, 2010 Reviewed: July 30th, 2011 Published: December 2nd, 2011

DOI: 10.5772/24316

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Written By

J.P. Allain

Submitted: December 4th, 2010 Reviewed: July 30th, 2011 Published: December 2nd, 2011