Open access peer-reviewed chapter

Fabrication of 3-D Structures Utilizing Synchrotron Radiation Lithography

Written By

Mitsuhiro Horade and Susumu Sugiyama

Submitted: December 6th, 2010 Reviewed: May 6th, 2011 Published: December 2nd, 2011

DOI: 10.5772/24371

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Written By

Mitsuhiro Horade and Susumu Sugiyama

Submitted: December 6th, 2010 Reviewed: May 6th, 2011 Published: December 2nd, 2011