Nanotechnology and Nanomaterials

Recent Advances in Nanofabrication Techniques and Applications

Edited by Bo Cui, ISBN 978-953-307-602-7, 626 pages, Publisher: InTech, Chapters published December 02, 2011 under CC BY 3.0 license
DOI: 10.5772/859
Edited Volume

Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography.

Prof. Bo Cui

University of Waterloo, Canada

Dr. Bo Cui received his BS in physics from Peking University, China, in 1994. After two years of graduate study in the same department, he moved to the University of Minnesota, and then to Princeton University in 1998, where he earned his Master’s degree in 2000 and PhD in 2003, from the Nanostructure Laboratory, Department of Electrical Engineering. After completing his PhD, he joined the National Research Council of Canada, Industrial Materials Institute in Montreal in 2003 as a staff scientist. Dr. Bo Cui joined the Department of Electrical and Computer Engineering, University of Waterloo, in 2008 as an Assistant Professor, and currently h e currently leads the Waterloo Nanofabrication Group, with a research focus on the development of nanofabrication technologies and applications.

Experience

Edited Books

  • Recent Advances in Nanofabrication Techniques and Applications

    Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography.

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