Open access peer-reviewed Edited Volume

Microelectromechanical Systems and Devices

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76,441 Chapter Downloads

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Academic Editor

Nazmul Islam
Nazmul Islam

The University of Texas Rio Grande Valley,
United States of America

Published28 March 2012

Doi10.5772/1363

ISBN978-953-51-0306-6

eBook (PDF) ISBN978-953-51-6178-3

Copyright year2012

Number of pages494

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Edited Volume and chapters are indexed in

  • Google Scholar
  • DOAB
  • Crossref
  • Dimension
  • OpenAIRE
  • AZ ebsco
  • Worldcat
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Table of Contents

Open access  chapters

1. Implantable Parylene MEMS RF Coil for Epiretinal Prostheses

By Wen Li, Damien C. Rodger, James D. Weiland, Mark S. Humayun, Wentai Liu and Yu-Chong Tai

3,622
2. MEMS-Based Microdevice for Cell Lysis and DNA Extraction

By Xing Chen, Dafu Cui, Haoyuan Cai, Hui Li, Jianhai Sun and Lulu Zhang

3,558
2
3,802
5
5,887
3
3,751
9. Dynamics of RF Micro-Mechanical Capacitive Shunt Switches in Coplanar Waveguide Configuration

By Romolo Marcelli, Daniele Comastri, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti and Giancarlo Bartolucci

3,297
4
10. Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches

By Romolo Marcelli, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti, George Papaioannou, Giancarlo Bartolucci, Flavio Giacomozzi and Benno Margesin

2,628
3
12. Optical MEMS

By Wibool Piyawattanametha and Zhen Qiu

9,234
2
16. Thermal Microactuators

By Leslie M. Phinney, Michael S. Baker and Justin R. Serrano

3,873
18. Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

By T. S. Santra, T. K. Bhattacharyya, P. Patel, F. G. Tseng and T. K. Barik

8,557
4

IMPACT OF THIS BOOK AND ITS CHAPTERS

76,441 Total Chapter Downloads

2,388 Total Chapter Views

41 Crossref Citations

58 Web of Science Citations

94 Dimensions Citations

10 Altmetric Score

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