Open access peer-reviewed Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

The University of Texas Rio Grande Valley, United States of America

The advances of microelectromechanical systems (MEMS) and devices have been instrumental in the demonstration of new devices and applications, and even in the creation of new fields of research and development: bioMEMS, actuators, microfluidic devices, RF and optical MEMS. Experience indicates a need for MEMS book covering these materials as well as the most important process steps in bulk micro-machining and modeling. We are very pleased to present this book that contains 18 chapters, written by the experts in the field of MEMS. These chapters are groups into four broad sections of BioMEMS Devices, MEMS characterization and micromachining, RF and Optical MEMS, and MEMS based Actuators. The book starts with the emerging field of bioMEMS, including MEMS coil for retinal prostheses, DNA extraction by micro/bio-fluidics devices and acoustic biosensors. MEMS characterization, micromachining, macromodels, RF and Optical MEMS switches are discussed in next sections. The book concludes with the emphasis on MEMS based actuators.

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Microelectromechanical Systems and DevicesEdited by Nazmul Islam

Published: March 28th 2012

DOI: 10.5772/1363

ISBN: 978-953-51-0306-6

eBook (PDF) ISBN: 978-953-51-6178-3

Copyright year: 2012

Books open for chapter submissions

69513 Total Chapter Downloads

19 Crossref Citations

42 Web of Science Citations

65 Dimensions Citations


Open access peer-reviewed

1. Implantable Parylene MEMS RF Coil for Epiretinal Prostheses

By Wen Li, Damien C. Rodger, James D. Weiland, Mark S. Humayun, Wentai Liu and Yu-Chong Tai


Open access peer-reviewed

2. MEMS-Based Microdevice for Cell Lysis and DNA Extraction

By Xing Chen, Dafu Cui, Haoyuan Cai, Hui Li, Jianhai Sun and Lulu Zhang


Open access peer-reviewed

3. MEMS Microfluidics for Lab-on-a-Chip Applications

By Nazmul Islam and Saief Sayed


Open access peer-reviewed

4. Acoustic Wave Based MEMS Devices, Development and Applications

By Ioana Voiculescu and Anis N. Nordin


Open access peer-reviewed

5. MEMS Characterization Based on Optical Measuring Methods

By Tong Guo, Long Ma and Yan Bian


Open access peer-reviewed

6. Surface Characterization and Interfacial Adhesion in MEMS Devices

By Y. F. Peng and Y. B. Guo


Open access peer-reviewed

7. Advanced Surfactant-Modified Wet Anisotropic Etching

By Bin Tang and Kazuo Sato


Open access peer-reviewed

8. Macromodels of Micro-Electro-Mechanical Systems (MEMS)

By Anatoly Petrenko


Open access peer-reviewed

9. Dynamics of RF Micro-Mechanical Capacitive Shunt Switches in Coplanar Waveguide Configuration

By Romolo Marcelli, Daniele Comastri, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti and Giancarlo Bartolucci


Open access peer-reviewed

10. Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches

By Romolo Marcelli, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti, George Papaioannou, Giancarlo Bartolucci, Flavio Giacomozzi and Benno Margesin


Open access peer-reviewed

11. Plasma Based Dry Release of MEMS Devices

By Hamood Ur Rahman


Open access peer-reviewed

12. Optical MEMS

By Wibool Piyawattanametha and Zhen Qiu


Open access peer-reviewed

13. Optical-Thermal Phenomena in Polycrystalline Silicon MEMS During Laser Irradiation

By Justin R. Serrano and Leslie M. Phinney


Open access peer-reviewed

14. Piezoelectric Thick Films: Preparation and Characterization

By J. Pérez de la Cruz


Open access peer-reviewed

15. Possibilities for Flexible MEMS: Take Display Systems as Examples

By Cheng-Yao Lo


Open access peer-reviewed

16. Thermal Microactuators

By Leslie M. Phinney, Michael S. Baker and Justin R. Serrano


Open access peer-reviewed

17. Standalone Tensile Testing of Thin Film Materials for MEMS/NEMS Applications

By Arash Tajik and Hamid Jahed


Open access peer-reviewed

18. Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

By T. S. Santra, T. K. Bhattacharyya, P. Patel, F. G. Tseng and T. K. Barik


Edited Volume and chapters are indexed in

  • Worldcat
  • OpenAIRE
  • Google Scholar
  • AZ ebsco
  • Base
  • CNKI

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