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Standalone Tensile Testing of Thin Film Materials for MEMS/NEMS Applications

Written By

Arash Tajik and Hamid Jahed

Submitted: March 2nd, 2011 Published: March 28th, 2012

DOI: 10.5772/28725

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Written By

Arash Tajik and Hamid Jahed

Submitted: March 2nd, 2011 Published: March 28th, 2012