Open access peer-reviewed chapter

Standalone Tensile Testing of Thin Film Materials for MEMS/NEMS Applications

By Arash Tajik and Hamid Jahed

Submitted: March 2nd 2011Reviewed: July 18th 2011Published: March 28th 2012

DOI: 10.5772/28725

Downloaded: 3592

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Arash Tajik and Hamid Jahed (March 28th 2012). Standalone Tensile Testing of Thin Film Materials for MEMS/NEMS Applications, Microelectromechanical Systems and Devices, Nazmul Islam, IntechOpen, DOI: 10.5772/28725. Available from:

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