Open access

Dynamics of RF Micro-Mechanical Capacitive Shunt Switches in Coplanar Waveguide Configuration

Written By

Romolo Marcelli, Daniele Comastri, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti and Giancarlo Bartolucci

Submitted: 25 February 2011 Published: 28 March 2012

DOI: 10.5772/28251

From the Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

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Written By

Romolo Marcelli, Daniele Comastri, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti and Giancarlo Bartolucci

Submitted: 25 February 2011 Published: 28 March 2012