Open access peer-reviewed Edited Volume

Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

Edited by Kenichi Takahata

University of British Columbia, Canada

MEMS technology is increasingly penetrating into our lives and improving our quality of life. In parallel to this, advances in nanotechnology and nanomaterials have been catalyzing the rise of NEMS. Consisting of nine chapters reviewing state-of-the-art technologies and their future trends, this book focuses on the latest development of devices and fabrication processes in the field of these extremely miniaturized electromechanical systems. The book offers new knowledge and insight into design, fabrication, and packaging, as well as solutions in these aspects for targeted applications, aiming to support scientists, engineers and academic trainees who are engaged in relevant research. In the chapters, practical issues and advances are discussed for flexible microdevices, bioMEMS, intelligent implants, optical MEMS, nanomachined structures and NEMS, and others. Most of the chapters also focus on novel fabrication/packaging processes, including silicon bulk micromachining, laser micromachining, nanolithography, and packaging for implantable microelectronics enabled by nanomaterials.

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Advances in Micro/Nano Electromechanical Systems and Fabrication TechnologiesEdited by Kenichi Takahata

Published: May 29th 2013

DOI: 10.5772/46117

ISBN: 978-953-51-1085-9

eBook (PDF) ISBN: 978-953-51-6344-2

Copyright year: 2013

Books open for chapter submissions

31704 Total Chapter Downloads

13 Crossref Citations

31 Web of Science Citations

34 Dimensions Citations


Open access peer-reviewed

1. Flexible Circuit Technologies for Biomedical Applications

By Damien C. Rodger, Wen Li, James D. Weiland, Mark S. Humayun and Yu-Chong Tai


Open access peer-reviewed

2. Liquid Encapsulation Technology for Microelectromechanical Systems

By Norihisa Miki


Open access peer-reviewed

3. Electroporation Based Drug Delivery and Its Applications

By Tuhin Subhra Santra, Pen-Cheng Wang and Fang Gang Tseng


Open access peer-reviewed

4. Optical MEMS for Telecommunications: Some Reliability Issues

By Ivanka Stanimirović and Zdravko Stanimirović


Open access peer-reviewed

5. CMOS Compatible Bulk Micromachining

By John Ojur Dennis, Farooq Ahmad and M. Haris Khir


Open access peer-reviewed

6. Laser Micromachining for Gallium Nitride Based Light-Emitting Diodes

By Kwun Nam Hui and Kwan San Hui


Open access peer-reviewed

7. Mechanics of Nanoelectromechanical Systems: Bridging the Gap Between Experiment and Theory

By Hamed Sadeghian, Fred van Keulen and Hans Goosen


Open access peer-reviewed

8. Nanolithography

By Gunasekaran Venugopal and Sang-Jae Kim


Open access peer-reviewed

9. Nanotechnology for Packaging

By Artin Petrossians, John J. Whalen III, James D. Weiland and Florian Mansfeld


Edited Volume and chapters are indexed in

  • Worldcat
  • OpenAIRE
  • Google Scholar
  • AZ ebsco
  • Base
  • CNKI

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