Open access peer-reviewed Edited Volume

Advances in Micro/Nano Electromechanical Systems and Fabrication Technologies

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35,317 Chapter Downloads

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Academic Editor

Kenichi Takahata
Kenichi Takahata

University of British Columbia,
Canada

Published29 May 2013

Doi10.5772/46117

ISBN978-953-51-1085-9

eBook (PDF) ISBN978-953-51-6344-2

Copyright year2013

Number of pages236

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Table of Contents

Open access  chapters

1. Flexible Circuit Technologies for Biomedical Applications

By Damien C. Rodger, Wen Li, James D. Weiland, Mark S. Humayun and Yu-Chong Tai

3,697
1
3. Electroporation Based Drug Delivery and Its Applications

By Tuhin Subhra Santra, Pen-Cheng Wang and Fang Gang Tseng

3,468
6
4. Optical MEMS for Telecommunications: Some Reliability Issues

By Ivanka Stanimirović and Zdravko Stanimirović

3,241
2
5. CMOS Compatible Bulk Micromachining

By John Ojur Dennis, Farooq Ahmad and M. Haris Khir

3,379
1
8. Nanolithography

By Gunasekaran Venugopal and Sang-Jae Kim

9,409
5
9. Nanotechnology for Packaging

By Artin Petrossians, John J. Whalen III, James D. Weiland and Florian Mansfeld

2,962

IMPACT OF THIS BOOK AND ITS CHAPTERS

35,317 Total Chapter Downloads

3,235 Total Chapter Views

27 Crossref Citations

39 Web of Science Citations

64 Dimensions Citations

3 Altmetric Score

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