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Piezoelectric Thick Films: Preparation and Characterization

Written By

J. Pérez de la Cruz

Submitted: 17 February 2011 Published: 28 March 2012

DOI: 10.5772/27433

From the Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

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Written By

J. Pérez de la Cruz

Submitted: 17 February 2011 Published: 28 March 2012