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Diamond, Diamond-Like Carbon (DLC) and Diamond-Like Nanocomposite (DLN) Thin Films for MEMS Applications

Written By

T. S. Santra, T. K. Bhattacharyya, P. Patel, F. G. Tseng and T. K. Barik

Submitted: 10 March 2011 Published: 28 March 2012

DOI: 10.5772/29671

From the Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

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Written By

T. S. Santra, T. K. Bhattacharyya, P. Patel, F. G. Tseng and T. K. Barik

Submitted: 10 March 2011 Published: 28 March 2012