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Macromodels of Micro-Electro-Mechanical Systems (MEMS)

Written By

Anatoly Petrenko

Submitted: February 11th, 2011 Published: March 28th, 2012

DOI: 10.5772/26812

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Written By

Anatoly Petrenko

Submitted: February 11th, 2011 Published: March 28th, 2012