Open access

Plasma Based Dry Release of MEMS Devices

Written By

Hamood Ur Rahman

Submitted: 28 February 2011 Published: 28 March 2012

DOI: 10.5772/28420

From the Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

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Written By

Hamood Ur Rahman

Submitted: 28 February 2011 Published: 28 March 2012