Open access

Optical MEMS

Written By

Wibool Piyawattanametha and Zhen Qiu

Submitted: 20 February 2011 Published: 28 March 2012

DOI: 10.5772/27612

From the Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

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Written By

Wibool Piyawattanametha and Zhen Qiu

Submitted: 20 February 2011 Published: 28 March 2012