Open access

MEMS Characterization Based on Optical Measuring Methods

Written By

Tong Guo, Long Ma and Yan Bian

Submitted: 18 February 2011 Published: 28 March 2012

DOI: 10.5772/27524

From the Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

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Written By

Tong Guo, Long Ma and Yan Bian

Submitted: 18 February 2011 Published: 28 March 2012