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Optical-Thermal Phenomena in Polycrystalline Silicon MEMS During Laser Irradiation

Written By

Justin R. Serrano and Leslie M. Phinney

Submitted: February 28th, 2011 Published: March 28th, 2012

DOI: 10.5772/28424

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Written By

Justin R. Serrano and Leslie M. Phinney

Submitted: February 28th, 2011 Published: March 28th, 2012