Open access

Acoustic Wave Based MEMS Devices, Development and Applications

Written By

Ioana Voiculescu and Anis N. Nordin

Submitted: February 25th, 2011 Published: March 28th, 2012

DOI: 10.5772/28214

Chapter metrics overview

5,571 Chapter Downloads

View Full Metrics

Written By

Ioana Voiculescu and Anis N. Nordin

Submitted: February 25th, 2011 Published: March 28th, 2012