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Surface Characterization and Interfacial Adhesion in MEMS Devices

Written By

Y. F. Peng and Y. B. Guo

Submitted: February 18th, 2011 Published: March 28th, 2012

DOI: 10.5772/27506

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Written By

Y. F. Peng and Y. B. Guo

Submitted: February 18th, 2011 Published: March 28th, 2012