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Surface Characterization and Interfacial Adhesion in MEMS Devices

Written By

Y. F. Peng and Y. B. Guo

Submitted: 18 February 2011 Published: 28 March 2012

DOI: 10.5772/27506

From the Edited Volume

Microelectromechanical Systems and Devices

Edited by Nazmul Islam

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Written By

Y. F. Peng and Y. B. Guo

Submitted: 18 February 2011 Published: 28 March 2012