Open access peer-reviewed chapter

Characterization and Modeling of Charging Effects in Dielectrics for the Actuation of RF MEMS Ohmic Series and Capacitive Shunt Switches

Written By

Romolo Marcelli, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti, George Papaioannou, Giancarlo Bartolucci, Flavio Giacomozzi and Benno Margesin

Submitted: March 7th, 2011 Reviewed: July 22nd, 2011 Published: March 28th, 2012

DOI: 10.5772/29299

Chapter metrics overview

2,398 Chapter Downloads

View Full Metrics

Written By

Romolo Marcelli, Andrea Lucibello, Giorgio De Angelis, Emanuela Proietti, George Papaioannou, Giancarlo Bartolucci, Flavio Giacomozzi and Benno Margesin

Submitted: March 7th, 2011 Reviewed: July 22nd, 2011 Published: March 28th, 2012