Open access peer-reviewed Edited Volume

Micromachining Techniques for Fabrication of Micro and Nano Structures

Edited by Mojtaba Kahrizi

Concordia University

Micromachining is used to fabricate three-dimensional microstructures and it is the foundation of a technology called Micro-Electro-Mechanical-Systems (MEMS). Bulk micromachining and surface micromachining are two major categories (among others) in this field. This book presents advances in micromachining technology. For this, we have gathered review articles related to various techniques and methods of micro/nano fabrications, like focused ion beams, laser ablation, and several other specialized techniques, from esteemed researchers and scientists around the world. Each chapter gives a complete description of a specific micromachining method, design, associate analytical works, experimental set-up, and the final fabricated devices, followed by many references related to this field of research available in other literature. Due to the multidisciplinary nature of this technology, the collection of articles presented here can be used by scientists and researchers in the disciplines of engineering, materials sciences, physics, and chemistry.

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Micromachining Techniques for Fabrication of Micro and Nano StructuresEdited by Mojtaba Kahrizi

Published: February 3rd 2012

DOI: 10.5772/1364

ISBN: 978-953-307-906-6

eBook (PDF) ISBN: 978-953-51-6095-3

Copyright year: 2012

Books open for chapter submissions

46701 Total Chapter Downloads

16 Crossref Citations

37 Web of Science Citations

49 Dimensions Citations


Open access peer-reviewed

1. Focused Ion Beam Based Three-Dimensional Nano-Machining

By Gunasekaran Venugopal, Shrikant Saini and Sang-Jae Kim


Open access peer-reviewed

2. Miniature Engineered Tapered Fiber Tip Devices by Focused Ion Beam Micromachining

By Fei Xu, Jun-long Kou, Yan-qing Lu and Wei Hu


Open access peer-reviewed

3. Fundamentals of Laser Ablation of the Materials Used in Microfluiducs

By Tai-Chang Chen and Robert Bruce Darling


Open access peer-reviewed

4. Microwave Meta-Material Absorbers Utilizing Laser Micro-Machining Technology

By Hongmin Lee


Open access peer-reviewed

5. Laser Micromachining and Micro-Patterning with a Nanosecond UV Laser

By Xianghua Wang, Giuseppe Yickhong Mak and Hoi Wai Choi


Open access peer-reviewed

6. Laser Ablation for Polymer Waveguide Fabrication

By Shefiu S. Zakariyah


Open access peer-reviewed

7. Micro Eletro Discharge Milling for Microfabrication

By Mohammad Yeakub Ali, Reyad Mehfuz, Ahsan Ali Khan and Ahmad Faris Ismail


Open access peer-reviewed

8. Mechanical Micromachining by Drilling, Milling and Slotting

By T. Gietzelt and L. Eichhorn


Open access peer-reviewed

9. Release Optimization of Suspended Membranes in MEMS

By Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca, Edgar Norman Vázquez-Acosta, José Antonio Moreno-Cadenas and José Luis González-Vidal


Open access peer-reviewed

10. Micro Abrasive-Waterjet Technology

By H.-T. Liu and E. Schubert


Open access peer-reviewed

11. Electrochemical Spark Micromachining Process

By Anjali Vishwas Kulkarni


Open access peer-reviewed

12. Integrated MEMS: Opportunities & Challenges

By P.J. French and P.M. Sarro


Open access peer-reviewed

13. Modeling and Simulation of MEMS Components: Challenges and Possible Solutions

By Idris Ahmed Ali


Edited Volume and chapters are indexed in

  • Worldcat
  • OpenAIRE
  • Google Scholar
  • AZ ebsco
  • Base
  • CNKI

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