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Release Optimization of Suspended Membranes in MEMS

Written By

Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca, Edgar Norman Vázquez-Acosta, José Antonio Moreno-Cadenas and José Luis González-Vidal

Submitted: March 24th, 2011 Published: February 3rd, 2012

DOI: 10.5772/30909

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Written By

Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca, Edgar Norman Vázquez-Acosta, José Antonio Moreno-Cadenas and José Luis González-Vidal

Submitted: March 24th, 2011 Published: February 3rd, 2012