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Laser Micromachining and Micro-Patterning with a Nanosecond UV Laser

Written By

Xianghua Wang, Giuseppe Yickhong Mak and Hoi Wai Choi

Submitted: 28 March 2011 Published: 03 February 2012

DOI: 10.5772/31205

From the Edited Volume

Micromachining Techniques for Fabrication of Micro and Nano Structures

Edited by Mojtaba Kahrizi

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Written By

Xianghua Wang, Giuseppe Yickhong Mak and Hoi Wai Choi

Submitted: 28 March 2011 Published: 03 February 2012