Open access peer-reviewed chapter

Integrated MEMS: Opportunities & Challenges

Written By

P.J. French and P.M. Sarro

Submitted: March 30th, 2011 Reviewed: October 26th, 2011 Published: February 3rd, 2012

DOI: 10.5772/31493

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Written By

P.J. French and P.M. Sarro

Submitted: March 30th, 2011 Reviewed: October 26th, 2011 Published: February 3rd, 2012