Open access

Integrated MEMS: Opportunities & Challenges

Written By

P.J. French and P.M. Sarro

Submitted: 30 March 2011 Published: 03 February 2012

DOI: 10.5772/31493

From the Edited Volume

Micromachining Techniques for Fabrication of Micro and Nano Structures

Edited by Mojtaba Kahrizi

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Written By

P.J. French and P.M. Sarro

Submitted: 30 March 2011 Published: 03 February 2012