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Focused Ion Beam Based Three-Dimensional Nano-Machining

Written By

Gunasekaran Venugopal, Shrikant Saini and Sang-Jae Kim

Submitted: March 16th, 2011 Published: February 3rd, 2012

DOI: 10.5772/30218

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Written By

Gunasekaran Venugopal, Shrikant Saini and Sang-Jae Kim

Submitted: March 16th, 2011 Published: February 3rd, 2012