Open access peer-reviewed chapter

Modeling and Simulation of MEMS Components: Challenges and Possible Solutions

Written By

Idris Ahmed Ali

Submitted: April 7th, 2011 Reviewed: September 15th, 2011 Published: February 3rd, 2012

DOI: 10.5772/32122

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Written By

Idris Ahmed Ali

Submitted: April 7th, 2011 Reviewed: September 15th, 2011 Published: February 3rd, 2012