Open access peer-reviewed Edited Volume

Micromachining Techniques for Fabrication of Micro and Nano Structures

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50,394 Chapter Downloads

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Academic Editor

Mojtaba Kahrizi

Concordia University

PublishedFebruary 3rd, 2012

Doi10.5772/1364

ISBN978-953-307-906-6

eBook (PDF) ISBN978-953-51-6095-3

Copyright year2012

Number of pages314

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Edited Volume and chapters are indexed in

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  • DOAB
  • Crossref
  • Dimension
  • OpenAIRE
  • AZ ebsco
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Table of Contents

Open access peer-reviewed  chapters

1. Focused Ion Beam Based Three-Dimensional Nano-Machining

By Gunasekaran Venugopal, Shrikant Saini and Sang-Jae Kim

3,871
1
7,596
1
5. Laser Micromachining and Micro-Patterning with a Nanosecond UV Laser

By Xianghua Wang, Giuseppe Yickhong Mak and Hoi Wai Choi

3,385
7. Micro Eletro Discharge Milling for Microfabrication

By Mohammad Yeakub Ali, Reyad Mehfuz, Ahsan Ali Khan and Ahmad Faris Ismail

3,458
9. Release Optimization of Suspended Membranes in MEMS

By Salvador Mendoza-Acevedo, Mario Alfredo Reyes-Barranca, Edgar Norman Vázquez-Acosta, José Antonio Moreno-Cadenas and José Luis González-Vidal

3,039
1
10. Micro Abrasive-Waterjet Technology

By H.-T. Liu and E. Schubert

2,488
4
4,395
2,795

IMPACT OF THIS BOOK AND ITS CHAPTERS

50,394 Total Chapter Downloads

22 Crossref Citations

39 Web of Science Citations

57 Dimensions Citations

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