Open access peer-reviewed Edited Volume

Ion Implantation

Ion implantation presents a continuously evolving technology. While the benefits of ion implantation are well recognized for many commercial endeavors, there have been recent developments in this field. Improvements in equipment, understanding of beam-solid interactions, applications to new materials, improved characterization techniques, and more recent developments to use implantation for nanostructure formation point to new directions for ion implantation and are presented in this book.

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Ion ImplantationEdited by Mark Goorsky

Published: May 30th 2012

DOI: 10.5772/1881

ISBN: 978-953-51-0634-0

eBook (PDF) ISBN: 978-953-51-4292-8

Copyright year: 2012

Books open for chapter submissions

35071 Total Chapter Downloads

18 Crossref Citations

78 Web of Science Citations

36 Dimensions Citations


Open access peer-reviewed

1. High-Resolution Ion Implantation from keV to MeV

By Sébastien Pezzagna and Jan Meijer


Open access peer-reviewed

2. Radio Frequency Quadrupole Accelerator: A High Energy and High Current Implanter

By Yuancun Nie, Yuanrong Lu, Xueqing Yan and Jiaer Chen


Open access peer-reviewed

3. Coulomb Heating Behaviour of Fast Light Diclusters in Si<100> Direction

By R. C. Fadanelli, M. Behar and J. F. Dias


Open access peer-reviewed

4. Lattice Strain Measurements in Hydrogen Implanted Materials for Layer Transfer Processes

By Caroline Moulet and Mark. S. Goorsky


Open access peer-reviewed

5. Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage

By Denis Shamiryan and Dmitriy V. Likhachev


Open access peer-reviewed

6. Determination of Near-Neighbour Bonding in the Mn-Implanted GaSb Crystals

By Anna Wolska


Open access peer-reviewed

7. Ion Implantation in Phase Change Ge2Sb2Te5 Thin Films for Non Volatile Memory Applications

By Stefania Maria Serena Privitera


Open access peer-reviewed

8. Si Nanocrystal Arrays Created in SiO2 Matrix by High-Energy Ion Bombardment

By Irina Antonova


Open access peer-reviewed

9. Nitridation of GaAs Surface by Low Energy Ion Implantation with In Situ Control of Chemical Composition

By Valery Mikoushkin


Open access peer-reviewed

10. Neon and Manganese Ion Implantation into AlInN

By Abdul Majid


Open access peer-reviewed

11. Implantation Damage Formation in GaN and ZnO

By Katharina Lorenz and Elke Wendler


Open access peer-reviewed

12. Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review Optical Waveguides Fabricated by Ion Implantation/Irradiation: A Review

By Ovidio Peña-Rodríguez, José Olivares, Mercedes Carrascosa, Ángel García-Cabañes, Antonio Rivera and Fernando Agulló-López


Open access peer-reviewed

13. Ga3+ Focused Ion Beam for Piezo Electric Nano Structuration Fabrication

By D. Rémiens, D. Deresmes, D. Troadec and J. Costecalde


Open access peer-reviewed

14. Ion Implantation for the Fabrication of Plasmonic Nanocomposites: A Brief Review

By Umapada Pal and Ovidio Peña Rodríguez


Open access peer-reviewed

15. Annealing Effects on the Particle Formation and the Optical Response

By Akira Ueda, Richard R. Mu and Warren E. Collins


Open access peer-reviewed

16. Ion Implantation-Induced Layer Splitting of Semiconductors

By U. Dadwal, M. Reiche and R. Singh


Open access peer-reviewed

17. Surface Modification by Ion Implantation to Improve the Oxidation Resistance of Materials for High Temperature Technology

By Hans-Eberhard Zschau and Michael Schütze


Edited Volume and chapters are indexed in

  • Worldcat
  • OpenAIRE
  • Google Scholar
  • AZ ebsco
  • Base
  • CNKI
  • BKCI

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