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Ga3+ Focused Ion Beam for Piezo Electric Nano Structuration Fabrication

Written By

D. Rémiens, D. Deresmes, D. Troadec and J. Costecalde

Submitted: 28 April 2011 Published: 30 May 2012

DOI: 10.5772/34139

From the Edited Volume

Ion Implantation

Edited by Mark Goorsky

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Written By

D. Rémiens, D. Deresmes, D. Troadec and J. Costecalde

Submitted: 28 April 2011 Published: 30 May 2012