Open access peer-reviewed chapter

Ga3+ Focused Ion Beam for Piezo Electric Nano Structuration Fabrication

Written By

D. Rémiens, D. Deresmes, D. Troadec and J. Costecalde

Submitted: April 28th, 2011 Reviewed: October 28th, 2011 Published: May 30th, 2012

DOI: 10.5772/34139

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Written By

D. Rémiens, D. Deresmes, D. Troadec and J. Costecalde

Submitted: April 28th, 2011 Reviewed: October 28th, 2011 Published: May 30th, 2012