Open access peer-reviewed chapter

High-Resolution Ion Implantation from keV to MeV

By Sébastien Pezzagna and Jan Meijer

Submitted: May 3rd 2011Reviewed: October 31st 2011Published: May 30th 2012

DOI: 10.5772/34601

Downloaded: 3170

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to cite and reference

Link to this chapter Copy to clipboard

Cite this chapter Copy to clipboard

Sébastien Pezzagna and Jan Meijer (May 30th 2012). High-Resolution Ion Implantation from keV to MeV, Ion Implantation, Mark Goorsky, IntechOpen, DOI: 10.5772/34601. Available from:

chapter statistics

3170total chapter downloads

4Crossref citations

More statistics for editors and authors

Login to your personal dashboard for more detailed statistics on your publications.

Access personal reporting

Related Content

This Book

Next chapter

Radio Frequency Quadrupole Accelerator: A High Energy and High Current Implanter

By Yuancun Nie, Yuanrong Lu, Xueqing Yan and Jiaer Chen

Related Book

First chapter

Introduction to Infrared Spectroscopy

By Theophile Theophanides

We are IntechOpen, the world's leading publisher of Open Access books. Built by scientists, for scientists. Our readership spans scientists, professors, researchers, librarians, and students, as well as business professionals. We share our knowledge and peer-reveiwed research papers with libraries, scientific and engineering societies, and also work with corporate R&D departments and government entities.

More About Us