Open access

High-Resolution Ion Implantation from keV to MeV

Written By

Sébastien Pezzagna and Jan Meijer

Submitted: 03 May 2011 Published: 30 May 2012

DOI: 10.5772/34601

From the Edited Volume

Ion Implantation

Edited by Mark Goorsky

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Written By

Sébastien Pezzagna and Jan Meijer

Submitted: 03 May 2011 Published: 30 May 2012