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Spectroscopic Ellipsometry of Ion-Implantation-Induced Damage

Written By

Denis Shamiryan and Dmitriy V. Likhachev

Submitted: 07 June 2011 Published: 30 May 2012

DOI: 10.5772/37758

From the Edited Volume

Ion Implantation

Edited by Mark Goorsky

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Written By

Denis Shamiryan and Dmitriy V. Likhachev

Submitted: 07 June 2011 Published: 30 May 2012