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Ion Implantation in Phase Change Ge2Sb2Te5 Thin Films for Non Volatile Memory Applications

Written By

Stefania Maria Serena Privitera

Submitted: May 10th, 2011 Published: May 30th, 2012

DOI: 10.5772/35338

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Written By

Stefania Maria Serena Privitera

Submitted: May 10th, 2011 Published: May 30th, 2012