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Nitridation of GaAs Surface by Low Energy Ion Implantation with In Situ Control of Chemical Composition

Written By

Valery Mikoushkin

Submitted: May 5th, 2011 Published: May 30th, 2012

DOI: 10.5772/34863

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Written By

Valery Mikoushkin

Submitted: May 5th, 2011 Published: May 30th, 2012