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Si Nanocrystal Arrays Created in SiO2 Matrix by High-Energy Ion Bombardment

Written By

Irina Antonova

Submitted: 22 April 2011 Published: 30 May 2012

DOI: 10.5772/33690

From the Edited Volume

Ion Implantation

Edited by Mark Goorsky

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Written By

Irina Antonova

Submitted: 22 April 2011 Published: 30 May 2012