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Implantation Damage Formation in GaN and ZnO

Written By

Katharina Lorenz and Elke Wendler

Submitted: May 4th, 2011 Published: May 30th, 2012

DOI: 10.5772/34751

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Written By

Katharina Lorenz and Elke Wendler

Submitted: May 4th, 2011 Published: May 30th, 2012