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Open access peer-reviewed Edited Volume

Micro Electronic and Mechanical Systems

Edited by Kenichi Takahata

University of British Columbia, Canada

This book discusses key aspects of MEMS technology areas, organized in twenty-seven chapters that present the latest research developments in micro electronic and mechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field. ?Several chapters cover state-of-the-art microfabrication techniques and materials as enabling technologies for the microsystems. Reliability issues concerning both electronic and mechanical aspects of these devices and systems are also addressed in various chapters.

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Micro Electronic and Mechanical SystemsEdited by Kenichi Takahata

Published: December 1st 2009

DOI: 10.5772/121

ISBN: 978-953-307-027-8

eBook (PDF) ISBN: 978-953-51-5847-9

Copyright year: 2009

Books open for chapter submissions

96354 Total Chapter Downloads

50 Crossref Citations

81 Web of Science Citations

91 Dimensions Citations


Open access peer-reviewed

1. Membrane Micro Emboss (MeME) Process for 3-D Membrane Microdevice

By Masashi Ikeuchi and Koji Ikuta


Open access peer-reviewed

2. A Review of Thermoelectric MEMS Devices for Micro-power Generation, Heating and Cooling Applications

By Chris Gould and Noel Shammas


Open access peer-reviewed

3. Micro Power Generation from Micro Fuel Cell Combined with Micro Methanol Reformer

By Taegyu Kim


Open access peer-reviewed

4. Non-Contact Measurement of Thickness Uniformity of Chemically Etched Si Membranes by Fiber-Optic Low-Coherence Interferometry

By Zoran Djinovic, Milos Tomic, Lazo Manojlovic, Zarko Lazic and Milce Smiljanic


Open access peer-reviewed

5. Nanomembrane: A New MEMS/NEMS Building Block

By Jovan Matovic and Zoran Jakšić


Open access peer-reviewed

6. Nanomembrane-Enabled MEMS Sensors: Case of Plasmonic Devices for Chemical and Biological Sensing

By Zoran Jakšić and Jovan Matovic


Open access peer-reviewed

7. Specific Serum-free Conditions can Differentiate Mouse Embryonic Stem Cells into Osteochondrogenic and Myogenic Progenitors.

By Hidetoshi Sakurai, Yuta Inami, Naomi Nishio, Sachiko Ito, Toru Yosikai, Haruhiko Suzuki and Ken-Ichi Isobe


Open access peer-reviewed

8. Micromanipulation with Haptic Interface

By Shahzad Khan, Hans H. Langen and Asif Sabanovic


Open access peer-reviewed

9. Fabrication of High Aspect Ratio Microcoils for Electromagnetic Actuators

By Daiji Noda, Masaru Setomoto and Tadashi Hattori


Open access peer-reviewed

10. Micro-Electro-Discharge Machining Technologies for MEMS

By Kenichi Takahata


Open access peer-reviewed

11. Mechanical Properties of MEMS Materials

By Zdravko Stanimirović and Ivanka Stanimirović


Open access peer-reviewed

12. Reliability of MEMS

By Ivanka Stanimirović and Zdravko Stanimirović


Open access peer-reviewed

13. Numerical Simulation of Plasma-Chemical Processing Semiconductors

By Yurii N. Grigoryev and Aleksey G. Gorobchuk


Open access peer-reviewed

14. Experimental Studies on Doped and Co-Doped ZnO Thin Films Prepared by RF Diode Sputtering

By Krasimira Shtereva, Vladimir Tvarozek, Pavel Sutta, Jaroslav Kovac and Ivan Novotny


Open access peer-reviewed

15. Self-Aligned π-Shaped Source/Drain Ultrathin SOI MOSFETs

By Yi-Chuen Eng and Jyi-Tsong Lin


Open access peer-reviewed

16. Accurate LDMOS Model Extraction Using DC, CV and Small Signal S Parameters Measurements for Reliability Issues

By Mouna Chetibi-Riah, Mohamed Masmoudi, Hichame Maanane, Jérôme Marcon, Karine Mourgues, Mohamed Ketata and Philippe Eudeline


Open access peer-reviewed

17. Comparative Analysis of High Frequency Characteristics of DDR and DAR IMPATT Diodes

By Alexander Zemliak


Open access peer-reviewed

18. Ohmic Contacts for High Power and High Temperature Microelectronics

By Lilyana Kolaklieva and Roumen Kakanakov


Open access peer-reviewed

19. Implications of Negative Bias Temperature Instability in Power MOS Transistors

By Danijel Danković, Ivica Manić, Snežana Djorić-Veljković, Vojkan Davidović, Snežana Golubović and Ninoslav Stojadinović


Open access peer-reviewed

20. Radiation Hardness of Semiconductor Programmable Memories and Over-Voltage Protection Components

By Boris Lončar, Miloš Vujisić, Koviljka Stanković and Predrag Osmokrović


Open access peer-reviewed

21. ANN Application to Modelling of the D/A and A/D Interface for Mixed-mode Behavioural Simulation

By Miona Andrejević Stošović and Vančo Litovski


Open access peer-reviewed

22. Electronic Circuits Diagnosis Using Artificial Neural Networks

By Miona Andrejević Stošović and Vančo Litovski


Open access peer-reviewed

23. Integration Verification in System on Chips Using Formal Techniques

By Subir K Roy


Open access peer-reviewed

24. Test Generation Based on CLP

By Giuseppe Di Guglielmo, Franco Fummi, Cristina Marconcini and and Graziano Pravadelli


Open access peer-reviewed

25. New Concepts of Asynchronous Circuits Worst-Case Delay and Yield Estimation

By Miljana Milić and Vančo Litovski


Open access peer-reviewed

26. Neuron Network Applied to Video Encoder

By Branko Markoski, Jovan Šetrajčić, Jasna Mihailović, Branko Petrevski, Miroslava Petrevski, Borislav Obradović, Zoran Milošević, Zdravko Ivanković, Dobrivoje Martinov and Dušanka Tesanović


Open access peer-reviewed

27. Single Photon Eigen-Problem with Complex Internal Dynamics

By Nenad V. Delić, Jovan P. Šetrajčić, Dragoljub Lj. Mirjanić, Zdravko Ivanković, Dobrivoje Martinov, Snežana Jokić, Ivana Petrevska–Đukić, Dušanka Tešanović and Svetlana Pelemiš


Edited Volume and chapters are indexed in

  • Worldcat
  • OpenAIRE
  • Google Scholar
  • AZ ebsco
  • Base
  • CNKI

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