Open access peer-reviewed chapter

Thermal Microactuators

By Leslie M. Phinney, Michael S. Baker and Justin R. Serrano

Submitted: February 23rd 2011Reviewed: September 27th 2011Published: March 28th 2012

DOI: 10.5772/28006

Downloaded: 2918

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Leslie M. Phinney, Michael S. Baker and Justin R. Serrano (March 28th 2012). Thermal Microactuators, Microelectromechanical Systems and Devices, Nazmul Islam, IntechOpen, DOI: 10.5772/28006. Available from:

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