Open access peer-reviewed chapter

Thermal Microactuators

By Leslie M. Phinney, Michael S. Baker and Justin R. Serrano

Submitted: February 23rd 2011Reviewed: September 27th 2011Published: March 28th 2012

DOI: 10.5772/28006

Downloaded: 3166

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Leslie M. Phinney, Michael S. Baker and Justin R. Serrano (March 28th 2012). Thermal Microactuators, Microelectromechanical Systems and Devices, Nazmul Islam, IntechOpen, DOI: 10.5772/28006. Available from:

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