Open access peer-reviewed chapter

MEMS Characterization Based on Optical Measuring Methods

By Tong Guo, Long Ma and Yan Bian

Submitted: February 18th 2011Reviewed: July 28th 2011Published: March 28th 2012

DOI: 10.5772/27524

Downloaded: 2626

© 2012 The Author(s). Licensee IntechOpen. This chapter is distributed under the terms of the Creative Commons Attribution 3.0 License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

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Tong Guo, Long Ma and Yan Bian (March 28th 2012). MEMS Characterization Based on Optical Measuring Methods, Microelectromechanical Systems and Devices, Nazmul Islam, IntechOpen, DOI: 10.5772/27524. Available from:

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