Open access peer-reviewed Edited Volume

Ion Beam Technology and Applications

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358 Chapter Downloads

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Academic Editor

Ozan Artun
Ozan Artun

Zonguldak Bülent Ecevit University,
Turkey

Published22 November 2023

Doi10.5772/intechopen.111060

ISBN978-1-83769-109-8

Print ISBN978-1-83769-108-1

eBook (PDF) ISBN978-1-83769-110-4

Copyright year2023

Number of pages110

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Table of Contents

Open access  chapters

3. Surface Microstructure Changes Induced by Ion Beam Irradiation

By Carlos A. Camacho Olguín, Arturo García Bórquez, Carlos A. González Rodríguez, Héctor Cruz Mejía and Marco Solorio Ávila

40
4. Oblique Ar+ Sputtered SiC Thin Films: Structural, Optical, and Electrical Properties

By Divya Gupta, Usha Rani, Rahul Singhal and Sanjeev Aggarwal

52
5. Electron Beam Processing of Biological Objects and Materials

By Ulyana Bliznyuk, Aleksandr Chernyaev, Victoria Ipatova, Aleksandr Nikitchenko, Felix Studenikin and Sergei Zolotov

73
1
58

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